Research progress of piezoelectric micropumps based on MEMS technology

In the application of micro and nano scale fluid control, piezoelectric micropumps have become a research focus because of their simple structure, high precision, high force density, fast response and good environmental adaptability. The research status of piezoelectric micropump was summarized from the perspective of actuation principle and fluid control scheme, and its applications in drug supply, cell separation, micro chemical detection and other fields were introduced. The problems of low output power, creep characteristic and high cost of piezoelectric micropump were pointed out, and the development direction of piezoelectric micropump was prospected.